COOLING DEVICE

摘要

PROBLEM TO BE SOLVED: To prevent disadvantage caused by ice found in a processing tank by the last operation when the cooling device performing cold air cooling is repeatedly operated after vacuum cooling to further reduce a pressure in the processing tank by supplying hot water into the processing tank during reducing a pressure in the processing tank and sucking its vapor. SOLUTION: The inside of the processing tank 2 is vertically divided into a first area 12 for receiving a cooled object 1 and a second area 13 communicated with the first area 12 through a partition 11. A cooler 7 for cooling the inside of the processing tank 2 and a fan 6 for supplying cold air into the first area 12 through the cooler 7 are disposed in the lower second area 13. A water seal-type vacuum pump 43 is disposed as a pressure reducing means 3 for sucking and discharging a gas in the processing tank 2 to the external. The sealed water to the vacuum pump 43 is supplied through a hollow portion 46 of a bottom wall of the processing tank 2. COPYRIGHT: (C)2008,JPO&INPIT