| 摘要 |
PROBLEM TO BE SOLVED: To provide an evaporator that can form a thin film with a uniform thickness on a large-area substrate without rotation of the substrate and have a high efficiency of use of a material to be evaporated. SOLUTION: The present invention relates to an evaporator for vacuum thermal evaporation, and more particularly, to an evaporator having multi-layered conical slit nozzles, which can form a large-area uniform thin film and improve the efficiency of use of a material to be deposited. The evaporator includes a cylindrical crucible 110 with an open top face and a nozzle unit 120 having a cylindrical body portion 121 assembled to the top face of the crucible 110, wherein the body portion 121 is provided with multilayered conical slits 122 formed at an upper periphery of the body portion 121 while being bored through the body portion, and an evaporation tube 123 connected to the slits 122 while penetrating through a lower face of the body portion 121. The multi-layered conical slit nozzles provide a spouting distribution of a material to be deposited, which can increase the thickness uniformity of a deposited thin film and improve the efficiency of use of the material to be deposited. COPYRIGHT: (C)2008,JPO&INPIT
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