Micromechanical actuator, has shaft and drive unit that are connected using hinge-joint, and lever connected with shaft at its one end and connected with drive unit at its other end using hinge-joint

摘要

The actuator has a shaft (10) and a drive unit (21) that are connected by using a hinge-joint (31). A lever (41) is connected with the shaft at its one end, and is connected with the drive unit at its other end using the hinge-joint. The shaft and another drive unit are connected using another hinge joint, where the drive units are connected with an anchor using a third hinge joint and are electrostatic drive units comprising a movable electrode (61) and a fixed electrode (62).