| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor tester outputting an output current changing so as to follow a reference current without requiring high-accuracy resistances or capacitances. SOLUTION: In this semiconductor tester 10 comprising several modules 100 and 200 for testing a device 15 under test, one module 100 comprises an individual power supply 152, and a capacitor 140 being charged with the reference current Iref from a reference current supply 14 over a prescribed charge time and discharging over a prescribed discharge time during a period different from the charge time, The module 100 further includes a control part 160 for outputting a control signal proportioned to a potential difference caused by the charge and discharge of the capacitor 140, and a current output part for receiving the supply of electric power from the capacitor 140 during the discharge time of the capacitor 140 while from the power supply during a time other than the discharge time to output a current corresponding to the control signal. COPYRIGHT: (C)2008,JPO&INPIT
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