| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a charge-free and damage-free neutral particle beam treatment device which can radiate beams of large diameters to a treatment object and can obtain a high neutralization ratio by an economical and compact constitution. <P>SOLUTION: The neutral particle beam treatment device is provided with a holding part 20 to hold a treatment object X, a plasm generating part which repeats alternately the application and stop of a high-frequency voltage and generates plasma containing positive ions and negative ions in a vacuum chamber 3, an orifice electrode 4 which is placed in the vacuum chamber and arranged between the plasma generating part and the treatment object and shields ultraviolet rays emitted from the plasma, a grid electrode 5 arranged in an upper stream with respect to the orifice electrode in the vacuum chamber, and a bipolar power source 102 which applies a voltage between the orifice electrode and the grid electrode and takes out alternately the positive ions and the negative ions from the plasma generated in the plasma generating part. <P>COPYRIGHT: (C)2008,JPO&INPIT |
