| 摘要 |
PROBLEM TO BE SOLVED: To provide a foreign matter inspection system for accurately inspecting fine foreign matters present on the surface of an inspection target by one foreign matter inspection operation, even if the inspection target is transparent or opaque, and a foreign matter inspection method. SOLUTION: In the foreign matter inspection method for inspecting the foreign matter on the surface of the sheet-like inspection target supported by a support member to be continuously fed by using the foreign matter inspection system, having an inspection light irradiation part, a light detecting part, and an imaging processing part, inspection light is emitted in the tangential direction of the support member and the sheet-like inspection target at an angle of 80-90°, with respect to the normal line at the contact point of the support member and the sheet-like inspection target. The scattered light of the inspection light scattered by irradiating the foreign matter is detected by the light detection part, and the data of the light detection part is analyzed by the imaging processing part. COPYRIGHT: (C)2008,JPO&INPIT
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