TEMPERATURE SETTING METHOD OF THERMAL PROCESSING PLATE, COMPUTER-READABLE RECORDING MEDIUM RECORDING PROGRAM THEREON, AND TEMPERATURE SETTING APPARATUS FOR THERMAL PROCESSING PLATE

摘要

A temperature setting method of a thermal processing plate, a computer-readable recording medium recording program thereon, and a temperature setting apparatus for thermal processing plate are provided to optimize a processing state of a final substrate by optimizing timing to change temperature setting of a thermal processing plate. A measurement process is performed to measure a processing state of a substrate(W) after a substrate treatment process including a thermal process. A calculation process is performed to calculate an improvable in-plane tendency from an in-plane tendency of the substrate of the measured processing state by changing a temperature correction value for each of regions of a thermal processing plate. A temperature correction value changing process is performed to change a temperature correction value for each of the regions of the thermal processing plate when a magnitude of the improvable in-plane tendency exceeds a threshold value set in advance.