| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a pattern correction device capable of mounting a test substrate with ease. <P>SOLUTION: The pattern correction device comprises: a Y-axis table 9 on which a glass substrate 6 to be corrected is mounted when defect correction to correct the open defect 41a of an electrode 41 is carried out; a sub-table 43 on which the test substrate 42 is mounted when a test for setting the application condition of a correction paste 40 is conducted; and a correction liquid application mechanism 4 which applies the correction paste 40 to the open defect 41a when the defect correction is carried out and applies the correction paste 40 to the test substrate 42 when the test is conducted. Thus, by preparing the sub-table 43 at a position close to the outside of the device, the test substrate 42 can be easily mounted on the sub-table 43. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
