| 摘要 |
PROBLEM TO BE SOLVED: To provide a ceramic multilayer substrate of high dimensional accuracy, which can be split by a splitting groove. SOLUTION: The ceramic multilayer substrate is provided with respectively sintered first insulating layer 3 and second insulating layer 5 of different contraction start temperatures, an outermost layer 11 comprises the first insulating layers 3 and 11, the second insulating layers 5 and 13, laminated adjacent to the inner side of the first insulating layers 3 and 11, are provided, and the splitting groove 7 is formed to the middle of the first insulating layers 3 and 11. Thus, the first insulating layers 3 and 11 are not completely partitioned in the adjacent substrate region, high-contraction suppression effect in the surface direction of the entire ceramic multilayer substrate 1 can be maintained and substantially uniformized, and the ceramic multilayer substrate 1 of high dimensional accuracy which can be easily split by the splitting groove 7 is provided. COPYRIGHT: (C)2008,JPO&INPIT |
