| 摘要 |
PROBLEM TO BE SOLVED: To provide a light source device capable of reducing speckle and supplying high-quality coherent light. SOLUTION: The light source device is equipped with: a light source part 11 supplying light which is the coherent light and which includes a first polarized light component having a first vibration direction; a polarizing beam splitter 12 which is a polarized light separation part transmitting the light of the first polarized light component and reflecting the light of a second polarized light component having a second vibrating direction nearly orthogonal to the first vibrating direction, thereby separating the first polarized light component and the second polarized light component; and a first mirror 13, a second mirror 14 and a third mirror 15 which are reflection parts provided in the optical path of light from the polarized light separation part and reflecting the light from the polarized light separation part, thereby making it incident on the polarized light separation part. The reflection parts make an optical path difference between the light transmitted through the polarized light separation part out of the light made incident on the polarized light separation part from the reflection parts and the light transmitted through the polarized light separation part out of the light reflected by the polarized light separation part and further made incident on the polarized light separation part through the reflection parts. COPYRIGHT: (C)2008,JPO&INPIT
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