METHOD FOR PRODUCING METAL OXIDE FILM, AND LAYERED PRODUCT

摘要

PROBLEM TO BE SOLVED: To provide a method for producing a metal oxide film simply obtaining a metal oxide film in which crystallinity and a crystallized state of crystal structure are varied gradually or continuously. SOLUTION: The method for producing a metal oxide film comprises using two or more metal sources having the same metallic element and different nonmetallic parts and bringing a solution for forming a metal oxide film in which metal-source molar fractions of the two or more metal sources differ into contact with a substrate heated to a metal oxide film-forming temperature or higher while changing the metal-source molar fractions to thereby form a metal oxide film in which the crystal state is varied on the substrate. COPYRIGHT: (C)2008,JPO&INPIT