| 摘要 |
PROBLEM TO BE SOLVED: To provide a discharge monitor for limiting reaction time by depositing an insulation film with a partially different thickness on a wafer equipped with a plurality of discharge monitor elements. SOLUTION: The invention relates to the discharge monitor equipped with a second insulation protective layer for protecting the discharge monitor elements on a discharge monitor substrate on which a plurality of discharge monitor elements constituted of at least two or more charge collection electrodes, a low melting point metal wire for connecting them, and a first insulation protective layer for protecting the low melting point metal wire are provided in parallel. COPYRIGHT: (C)2008,JPO&INPIT
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