METHOD FOR THE PLASMA TREATMENT OF A SURFACE

摘要

The invention relates to a method for the plasma treatment of a surface in a hollow body (4), in which firstly the hollow body (4) which has a wall of dielectric material is filled with a process gas, after which the hollow body (4) is sealed gas-tight and introduced into a space (5) between at least two electrodes (1, 2), with the external pressure prevailing in this space (5) being above 0.5 bar, while an internal pressure likewise of at least 0.5 bar prevails in an inner chamber of the hollow body (4), and the space (5) between the electrodes (1, 2) being filled with a gas which has at the external pressure a higher ignition voltage than the process gas at the internal pressure. Finally, a plasma is ignited in the inner chamber of the hollow body (4) by applying a sufficiently high alternating voltage between the electrodes (1, 2).