| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a detection apparatus capable of detecting deterioration in accuracy, and to provide a detection method and an optically transparent member therefor. <P>SOLUTION: In the detection apparatus, convolution is performed by a convolution portion 80 contained in an image processing portion 38 for acquiring distribution information, indicating the spatial light intensity distribution of a light beam which is totally reflected at the interface of a dielectric block 52, after being made incident at a plurality of angles to the dielectric block 52 so that it is totally reflected at the interface; then, the spatial frequency resolution is performed on the light intensity distribution indicated by the distribution information acquired, by a detection accuracy evaluating portion 86 included in the image processing portion 38, to thereby derive the light intensity distribution by each spatial frequency of the light beams; and accuracy is detected, by comparing the light intensity distribution derived with the threshold that is predetermined for each spatial frequency. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
