| 摘要 |
Laser scanning apparatus and method using diffractive optical elements are disclosed. In one embodiment, an apparatus includes a radiation source to generate a radiation beam with an intensity profile and a wavelength capable of heating a region of a substrate, a beam shaping device based on a diffractive optical element (DOE) to transform the radiation beam to a particular shape with a particular intensity profile to illuminate the region and a state adapted to support the substrate. In another aspect, a method includes generating from a radiation source a radiation beam with an intensity profile and a wavelength capable of heating a region of a substrate transforming a shape of the radiation beam with the intensity profile to a particular shape of the radiation beam with a particular intensity profile through processing the radiation beam in a beam shaping device based on a diffractive optical element (DOE).
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