| 摘要 |
A hybrid high-strength probe structure manufacturing method using a plating binding method of different kinds of materials is provided to secure mechanical stability of a probe structure and to prevent wear resistance by combining a spring unit with relieved plating stress and a high-strength probe unit through plating using the different kinds of materials. A hybrid high-strength probe structure manufacturing method using a plating binding method of different kinds of materials is composed of steps for forming a probe unit(260) on a substrate; forming a second photosensitive film on the substrate having the probe unit; forming a pattern of a spring unit(270) on the second photosensitive film; plating the pattern of the spring unit; removing the second photosensitive film; separating a probe structure(280) from the substrate; and inserting the probe structure into a carrier hole. |
