摘要 |
PROBLEM TO BE SOLVED: To provide a scintillator panel without deformation of a substrate film due to thermal shrinkage, decrease in columnar crystallinity of a scintillator, or scaling with high efficiency in luminescence and luminescence extraction, enabling uniform contact of the scintillator panel and a plane light receiving element side, with low degradation of sharpness between a scintillator panel side and the plane light receiving element side. SOLUTION: This scintillator panel having a scintillator layer formed on a high polymer film by vapor deposition of materials of the scintillator is heat-treated over one hour under the atmosphere of a temperature range of -50 to +20°C with the glass transition temperature of the high polymer film as reference after vapor deposition. COPYRIGHT: (C)2008,JPO&INPIT
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