摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a new photovoltaic cell and a photoelectric conversion element that has high yields, without having to use conventional clean rooms. <P>SOLUTION: In the photovoltaic cell in which anode electrode and cathode electrode are formed into a spiral shape, with a semiconductor layer being sandwiched therebetween and formed into a plate-like shape as a whole; and light is made incident in an intersecting direction with respect to the plate. When a photovoltaic cell in which a band gap of the semiconductor layer is reduced stepwise and/or continuously from a light-incident plane of the plate in the thickness direction of the plate is manufactured, a clean unit which maintains a workroom 251 in a clean environment by using a dust-proof filter 256 is used. A dust-proof filter 256 has blowing power and is configured, such that all of the gas that flows out of the workroom 251 enters the inlet of the dust-proof filter 256. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |