发明名称 Compound semiconductor substrate grown on metal layer, method for manufacturing the same, and compound semiconductor device using the same
摘要 The present invention relates to a compound semiconductor substrate and a method for manufacturing the same. The present invention provides the manufacturing method which coats spherical balls on a substrate, forms a metal layer between the spherical balls, removes the spherical balls to form openings, and grows a compound semiconductor layer from the openings. According to the present invention, the manufacturing method can be simplified and grow a high quality compound semiconductor layer rapidly, simply and inexpensively, as compared with a conventional ELO (Epitaxial Lateral Overgrowth) method or a method for forming a compound semiconductor layer on a metal layer. And, the metal layer serves as one electrode of a light emitting device and a light reflecting film to provide a light emitting device having reduced power consumption and high light emitting efficiency.
申请公布号 US2008105881(A1) 申请公布日期 2008.05.08
申请号 US20070982716 申请日期 2007.11.02
申请人 发明人 KIM YONG-JIN;KIM DOO-SOO;LEE HO-JUN;LEE DONG-KUN
分类号 H01L21/205;H01L29/06;H01L33/12;H01L33/32;H01L33/44 主分类号 H01L21/205
代理机构 代理人
主权项
地址