发明名称 WIRE BONDING APPARATUS AND METHOD
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a wire bonding apparatus capable of suppressing the wire deformation accompanying a tail cutting operation. <P>SOLUTION: The wire bonding apparatus has a capillary 2 for inserting a wire 1 thereinto, a clamper 3 capable of supporting the wire 1 in a sandwiching way, and a load sensor 6 for measuring the load applied to the wire 1. <P>COPYRIGHT: (C)2008,JPO&INPIT</p>
申请公布号 JP2008108971(A) 申请公布日期 2008.05.08
申请号 JP20060291574 申请日期 2006.10.26
申请人 TOSHIBA CORP 发明人 NAKAO MITSUHIRO;ISHIDA KATSUHIRO;OKANE NOBORU;SAGARA JUNYA
分类号 H01L21/60 主分类号 H01L21/60
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