| 摘要 |
PROBLEM TO BE SOLVED: To provide a tape cartridge for cleaning substrates, which can be effectively used for precisely and efficiently removing foreign materials attached on the substrates, i.e., workpieces, by the use of an adhesive tape. SOLUTION: The tape cartridge is provided with a tape supplying part 22 for supplying an adhesive tape T, a tape recovery part 24 for rewinding and recovering the adhesive tape T after adhering the tape on the substrate, i.e., the workpiece, and then removing the tape from the substrate, and a housing 19 that stores the tape supplying part 22 and the tape recovery part 24 and has a tape exposing part for adhering the adhesive tape T on the substrate. COPYRIGHT: (C)2008,JPO&INPIT
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