| 摘要 |
A MEMS flow module ( 340 ) includes a plurality of filtering sections ( 344 ). Each filtering section ( 344 ) is defined by a stack ( 342 ) of a plurality of layers ( 346, 348, 350, 352 ). Each filtering section ( 344 ) includes at least one filter trap ( 364, 368 ) at each of at least two different levels or elevations within the stack ( 342 ). This provides for an increased flow rate through the MEMS flow module ( 340 ). |
