| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a pressure loader for firing a multilayer ceramic substrate, reducing the difference in shrinkage between the edge region and the inner region of a layered product by pressurizing the edge region and the inner region of the layered product separately when firing the ceramic layered product for manufacturing the multilayer ceramic substrate. <P>SOLUTION: The pressure loader for firing a multilayer ceramic substrate comprises an outer loader and an inner loader, provided that the outer loader is mounted on the edge region on the surface of the ceramic layered product to pressurize the edge region and the inner loader is mounted on the inner region excluding the edge region to pressurize the inner region. In another aspect, a method of manufacturing the multilayer ceramic substrate using the pressure loader is provided. <P>COPYRIGHT: (C)2008,JPO&INPIT |
