PRODUCTION METHOD OF SENSOR AND PRODUCTION METHOD OF RESONATOR

摘要

PROBLEM TO BE SOLVED: To provide a production method of sensors and the like capable of achieving high productivity.

SOLUTION: In production of sensors which are equipped with a disk-like vibrator, a driving electrode and a detecting electrode arranged at a circumference of the vibrator on the other side of gap, the production method of the sensors is designed to include a first pattern forming process implementing pattern formation on the vibrator and the gap section between the driving electrode and the detecting electrode by irradiating electron beam and also a second pattern forming process implementing pattern formation on the vibrator and the section other than gap section between the driving electrode and a detecting electrode by a stepper. An alignment mark M for performing pattern formation by irradiating electron beam is formed so as not to penetrate an active Si layer 53 to prevent charge-up in a box layer 52.

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