POLISHING DEVICE FOR DISC-LIKE SUBSTRATE, AND DISC-LIKE SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To polish the inner periphery of a disc-like substrate with high precision by suppressing occurrence of run-out in the rotation of a polishing brush. SOLUTION: The polishing device is provided with: a substrate holder 50 for stacking and holding the disc-like substrates having a hole at the center each; the brush 60 for polishing the hole in the disc-like substrate stacked in the substrate holder 50; a first rotary shaft 71 to which one end of a shaft 63 of the brush 60 is fixed; a second rotary shaft 72 which is provided apart from the first rotary shaft 71 and to which the other end of the brush 60 is fixed; and an energizing means for moving the first rotary shaft 71 and/or the second rotary shaft 72 in the axial direction to give tensile force in the axial direction of a core to the core. COPYRIGHT: (C)2008,JPO&INPIT