MODEL PREPARING DEVICE, PROCESS ABNORMALITY ANALYZING DEVICE, METHOD AND PROGRAM OF THEM

摘要

PROBLEM TO BE SOLVED: To provide a model preparing device capable of setting suitable process step intervals and being used for the prediction of quality of an object.

SOLUTION: A model preparing device 10 inputs process data that are the information acquired in a time series during a period in which a process is carried out and related to the state of the process and inspection results information about an object processed by the process, and prepares a process-quality model representing the relationship between a process feature value that is extracted from the process-state information and the inspection results information. A step matching section 10a determines the interval of the process step for each process data of individual processes. A feature-value extracting section 10b extracts the process feature value for each unit object and each determined process step. An analyzing section 10e prepares a process-quality model by using the process feature value and the inspection results information that are matched because the related unit objects are common and executing analysis by data mining or the like.

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