| 摘要 |
PROBLEM TO BE SOLVED: To provide a carrier loader where, even in the case the objects to be carried each having a projection or the like on the surface are accumulated, whether the accumulation operation is disturbed by the another object to be carried which have been beforehand loaded or not can be correctly judged. SOLUTION: Regarding the adsorption control section 102 in the carrier loader 5, in the case where, directly after the object to be carried is adsorbed with a selected vacuum cup, a proximity switch for stock detection corresponding to the vacuum cup detects the rise of the vacuum cup, based on the detected signal from the proximity switch for stock detection, it is judged that the adsorption of the object to be carried is retained, and also, in the case an another proximity switch for stock detection different from the proximity switch for stock detection detecting the vacuum cup which has been risen detects the rise of a vacuum cup corresponding to the another proximity switch for stock detection during the carriage of the object to be carried, the object to be carried is released based on the detected signal from the another proximity switch for stock detection. COPYRIGHT: (C)2008,JPO&INPIT
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