| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultraviolet ray irradiation apparatus which stabilizes the oxygen concentration at a low state in an area conducting an irradiation with ultraviolet rays and which controls the amount of consumption of nitrogen gas. SOLUTION: The ultraviolet ray irradiation apparatus 50 is provided with a lamp unit arranged at the opposite to a conveying roll 60 arranged in a convey pass through which a workpiece strip is travelling, and irradiating the workpiece with ultraviolet rays, and an inert gas purge area forming mechanism 1 installed between the lamp unit 40 and the conveying roll and forming an atmosphere space including an inert gas. The inert gas purge area forming mechanism 1 is provided with a circular arc side face shielding part 30 installed at the side face of the conveying roll, a roll front face shielding part 10 installed at the front face of the conveying roll, a shielding chamber 2 to surround the workpiece conveyed along the conveying roll by a roll back face shielding part 30 installed at the back face of the conveying roll and a gas supply part 15 forming a supply port 18 to supply the inert gas to the shielding chamber. COPYRIGHT: (C)2008,JPO&INPIT
|
