发明名称 |
Adhesive sheet for water jet laser dicing |
摘要 |
<p>The present invention provides an adhesive sheet for water jet laser dicing, comprising an adhesive layer laminated on a base film which has a mean opening diameter of 5 µm to 30 µm. According to the adhesive sheet of the invention, a base film having a mean opening diameter of a certain size is used, thus ensuring better permeability to liquids originating in a liquid stream, and preventing the material that is being processed from being separated by the liquids from the adhesive sheet. In addition, the relatively low mean opening diameter makes it possible to control rippling on the surface of the base film and kept the surface flat, resulting in better adhesion to the material being processed and ensuring that the material being processed is secured during the dicing stage. The ability to improve the adhesion between the base film and the adhesive layer also makes it possible to prevent the separation of the adhesive form the base film and the adhesion of the adhesion on the material being processed when picked up after dicing.</p> |
申请公布号 |
EP1918343(A1) |
申请公布日期 |
2008.05.07 |
申请号 |
EP20070021321 |
申请日期 |
2007.10.31 |
申请人 |
NITTO DENKO CORPORATION |
发明人 |
ASAI, FUMITERU;SASAKI, TAKATOSHI;SHINTANI, TOSHIO;TAKAHASHI, TOMOKAZU;MIKI, TSUBASA;YAMAMOTO, AKIYOSHI |
分类号 |
C09J7/02;H01L21/68 |
主分类号 |
C09J7/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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