| 摘要 |
A workpiece rotation apparatus for a plasma reactor system is provided to process a planar workpiece for changing a rotation position of the workpiece with respect to a plasma process chamber. A plasma processing system includes a plurality of plasma reaction chambers(102,104,106,108), a workpiece transfer unit for transferring the workpiece to or from the chambers, and a factory interface(120) coupled to the workpiece transfer unit to transfer the workpiece to an inside and an outside of a factory environment unit of the plasma processing system. The factory interface includes a frame for forming an internal volume, a rotatable and translatable arm(134) supported on the frame within the internal volume, a workpiece handling blade attached to an outer end of the arm, and a stationary workpiece holding support bracket(140) having a supporting edge fixed on the frame. The stationary workpiece holding support bracket further includes a first and second workpiece transfer edges.
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