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发明名称
DUAL BEAM SET-UP FOR SCATTEROMETER
摘要
申请公布号
EP1917517(A1)
申请公布日期
2008.05.07
申请号
EP20060780322
申请日期
2006.08.04
申请人
KONINKLIJKE PHILIPS ELECTRONICS N.V.
发明人
WADMAN, SIPKE
分类号
G01N21/27;G01N21/47
主分类号
G01N21/27
代理机构
代理人
主权项
地址
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