APPARATUS FOR CONTROLLING MULTIPLE COOLERS COMPRISED IN POWER SUPPLY OF WAFER BURN-IN SYSTEM

摘要

An apparatus for controlling a plurality of cooling fans included in a power supply apparatus of a wafer burn-in system is provided to easily check whether a cooling fan included in a power supply apparatus malfunctions by automatically determining the operation defect of a cooling fan based upon the rotation speed of a cooling fan and by displaying the determination result. A power supply apparatus of a wafer burn-in system includes a plurality of cooling fans(4-1~4-n). The rotation speed of each cooling fan is detected by a detection part(3-1~3-n). Based upon the rotation speed of the detected cooling fan, a determination part(5) determines whether the operation of each cooling fan is defective. Based upon the determination result, a control part(6) generates a control signal for displaying whether the operation of each cooling fan is defective. According to the control signal, a display part(7) displays whether the operation of each cooling fan is defective.