发明名称 |
THERMAL SPRAY POWDER, METHOD FOR FORMING THERMAL SPRAY COATING, AND PLASMA RESISTANT MEMBER |
摘要 |
<p>A thermal spray powder, a method for forming thermal spray coating, and a plasma resistant member provided to improve the quality of thermal spray coating by allowing thermal spray powder to have a high fluidity. A thermal spray powder comprises granulated and sintered particles containing oxide of one rare earth of elements having an atomic number of 60 to 70. A primary particle, which constitutes the granulated and sintered particles, has an average grain size of 2mum to 10mum. The granulated and sintered particles have a crushing strength of 7MPa to 50MPa. A ratio of general specific gravity to true specific gravity of the thermal spray powder is 0.10 to 0.30. A frequency distribution of pores in the granulated and sintered particles has a local maximum value within the range of 1mum or more. The thermal spray powder is subject to plasma thermal spray coating, thereby forming thermal spray coating.</p> |
申请公布号 |
KR20080039317(A) |
申请公布日期 |
2008.05.07 |
申请号 |
KR20070110165 |
申请日期 |
2007.10.31 |
申请人 |
FUJIMI INCORPORATED;TOKYO ELECTRON LIMITED |
发明人 |
IBE HIROYUKI;AOKI ISAO;KITAMURA JUNYA;MIZUNO HIROAKI;KOBAYASHI YOSHIYUKI;NAGAYAMA NOBUYUKI |
分类号 |
C23C4/10;C23C4/00 |
主分类号 |
C23C4/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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