发明名称 LEAK CONTAINMENT APPARATUS FOR REACTIVE GASES
摘要 <p>An apparatus for blocking a leakage of reactive gas is provided to block a leakage during an interval from a initial leakage detection point of time to a point of time for sending a leaking cylinder to properly included preventive equipment by including a collection aggregate for collecting and capturing reactive gas leakage from a fluid storing receptacle aggregate. A fluid storing receptacle aggregate includes at least one receptacle having an inner part, an outer part and a flow hole between the inner part and the outer part. A fluid flow joint(203) adjoins the outside of at least one receptacle, connected to the flow hole and capable of being sealed. The fluid flow joint is proper for exhausting reactive gas from the inside of the receptacle. A containment enclosure(201) has an inner part, an outer part, an open end part and an exhaust hole(209) proper for exhausting gas from the inside of the containment enclosure. The open end part is suited for the upper part and the circumference of the fluid flow joint in a manner that the containment enclosure surrounds the fluid flow joint and is suitable for collecting arbitrary reactive gas leaking from the fluid flow joint. The containment enclosure can be attached to the fluid flow receptacle aggregate on the circumference of the fluid flow joint, capable of being separated from the fluid flow receptacle aggregate.</p>
申请公布号 KR20080039310(A) 申请公布日期 2008.05.07
申请号 KR20070109786 申请日期 2007.10.30
申请人 AIR PRODUCTS AND CHEMICALS, INC. 发明人 MARTRICH ROBERT LEE;WHITESELL GORDON LEON;NGAI EUGENE YIN;DEITOS JAMES FRANCIS
分类号 H01L21/02 主分类号 H01L21/02
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