发明名称 MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
摘要 A method of manufacturing a semiconductor device is provided to control degradation of a PMOS stably by performing a counter doping process as an N-type impurity against the ions injected to control the threshold voltage, thereby preserving the current for signal transmission. A device isolation layer(306) defining an active region(304) is formed within a semiconductor substrate. An ion injection process for controlling the threshold voltage of a PMOS is performed by using a p-type impurity in the active region. A counter doping process is performed to a region corresponding to a gate forming region of interface regions between the active region and the device isolation layer by using an n-type impurity. A gate(308) is formed on the active region. A plurality of bit line contacts(316) are formed at each part of the substrate of both sides of the gate. A bit line(B) is formed and connected with the bit line contacts.
申请公布号 KR20080039127(A) 申请公布日期 2008.05.07
申请号 KR20060106904 申请日期 2006.10.31
申请人 HYNIX SEMICONDUCTOR INC. 发明人 KOO, DONG CHUL
分类号 H01L21/768 主分类号 H01L21/768
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