发明名称 METAL OXIDE FILM, LAMINATE, METAL MEMBER AND PROCESS FOR PRODUCING THE SAME
摘要 A metal oxide film suitable for protection of metals, composed mainly of aluminum. A metal oxide film includes a film of an oxide of a metal composed mainly of aluminum, having a thickness of 10 nm or greater, and exhibiting a moisture release rate from the film of 1E18 mol./cm 2 or less. Further, there is provided a process for producing a metal oxide film, wherein a metal composed mainly of aluminum is subjected to anodic oxidation in a chemical solution of 4 to 10 pH value so as to obtain a metal oxide film.
申请公布号 EP1918427(A1) 申请公布日期 2008.05.07
申请号 EP20060746158 申请日期 2006.05.09
申请人 TOHOKU UNIVERSITY;MITSUBISHI CHEMICAL CORPORATION 发明人 OHMI, TADAHIRO;SHIRAI, YASUYUKI;MORINAGA, HITOSHI;KAWASE, YASUHIRO;KITANO, MASAFUMI;MIZUTANI, FUMIKAZU;ISHIKAWA, MAKOTO
分类号 C25D11/04;C25D11/06;C25D11/18;H01L21/3065 主分类号 C25D11/04
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