发明名称 |
METAL OXIDE FILM, LAMINATE, METAL MEMBER AND PROCESS FOR PRODUCING THE SAME |
摘要 |
A metal oxide film suitable for protection of metals, composed mainly of aluminum. A metal oxide film includes a film of an oxide of a metal composed mainly of aluminum, having a thickness of 10 nm or greater, and exhibiting a moisture release rate from the film of 1E18 mol./cm 2 or less. Further, there is provided a process for producing a metal oxide film, wherein a metal composed mainly of aluminum is subjected to anodic oxidation in a chemical solution of 4 to 10 pH value so as to obtain a metal oxide film. |
申请公布号 |
EP1918427(A1) |
申请公布日期 |
2008.05.07 |
申请号 |
EP20060746158 |
申请日期 |
2006.05.09 |
申请人 |
TOHOKU UNIVERSITY;MITSUBISHI CHEMICAL CORPORATION |
发明人 |
OHMI, TADAHIRO;SHIRAI, YASUYUKI;MORINAGA, HITOSHI;KAWASE, YASUHIRO;KITANO, MASAFUMI;MIZUTANI, FUMIKAZU;ISHIKAWA, MAKOTO |
分类号 |
C25D11/04;C25D11/06;C25D11/18;H01L21/3065 |
主分类号 |
C25D11/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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