发明名称 |
METHOD AND APPARATUS FOR PRODUCING NITROGEN TRIFLUORIDE |
摘要 |
Disclosed is a method for producing nitrogen trifluoride wherein a fluorine gas and an ammonia gas are introduced into a tube reactor and reacted with each other in the presence of a diluting gas in a gas phase without using a catalyst, thereby producing a gaseous product mainly composed of nitrogen trifluoride and a solid product mainly composed of ammonium fluoride and/or an acidic ammonium fluoride, and then the solid product adhered to the inner wall of the tube reactor is removed by using a device which is attached to the tube reactor for removing the solid product.
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申请公布号 |
KR20080040030(A) |
申请公布日期 |
2008.05.07 |
申请号 |
KR20087007173 |
申请日期 |
2006.08.25 |
申请人 |
SHOWA DENKO KABUSHIKI KAISHA |
发明人 |
OHNO HIROMOTO;OHI TOSHIO;SAKAI YUJI |
分类号 |
C01B21/083;B01J19/00 |
主分类号 |
C01B21/083 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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