MEASUREMENT METHOD OF GATE INSULATION LAYER

摘要

A method of measuring the thickness of a gate insulation layer is provided to prevent surface contamination to minimize a measurement error due to variation in X-ray reflectivity. A method of measuring the thickness of a gate insulation layer includes the steps of: cleaning a substrate, on which a gate insulation layer is formed, using an isopropyl alcohol solution(10); measuring the thickness of an insulation layer using an X-ray reflectivity measurement method(20); calculating reflectivity by applying a layered structure model(30); and extracting the thickness of the gate insulation layer from a reflectivity curve(40).