DEVICE FOR GENERATING EXTREME ULTRAVIOLET LIGHT AND APPLICATION TO AN EXTREME ULTRAVIOLET RADIATION LITHOGRAPHY SOURCE,申请号EP20050777195-传众专利搜索

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发明名称	DEVICE FOR GENERATING EXTREME ULTRAVIOLET LIGHT AND APPLICATION TO AN EXTREME ULTRAVIOLET RADIATION LITHOGRAPHY SOURCE
摘要
申请公布号	EP1800188(B1)	申请公布日期	2008.05.07
申请号	EP20050777195	申请日期	2005.06.14
申请人	COMMISSARIAT A L'ENERGIE ATOMIQUE;ALCATEL VACUUM TECHNOLOGY FRANCE	发明人	CHEYMOL, GUY;CORMONT, PHILIPPE;THRO, PIERRE-YVES;SUBLEMONTIER, OLIVIER;SCHMIDT, MARTIN;BARTHOD, BENOIT
分类号	G03F7/20;G21K1/06;H01S3/23;H05G2/00	主分类号	G03F7/20
代理机构		代理人
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