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发明名称
Ceramic heaters
摘要
申请公布号
EP1351281(B1)
申请公布日期
2008.05.07
申请号
EP20030251609
申请日期
2003.03.17
申请人
NGK INSULATORS, LTD.
发明人
UNNO, YUTAKA;NOBORI, KAZUHIRO
分类号
H01L21/00;H05B3/20;H01L21/02;H01L21/205;H01L21/687;H05B3/06;H05B3/14;H05B3/18;H05B3/74
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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