| 摘要 |
An apparatus for etching a surface of a TFT(Thin Film Transistor)-LCD(Liquid Crystal Display) glass is provided to prevent contamination of a glass by minimizing an infiltration of impurities that may be attached on the glass in the process of transferring a cassette. A cassette(10) includes a jig(11) with a frame, into which an LCD glass is introduced, vertically formed on the bottom thereof. A main frame(20) includes a loading unit(21) and an unloading unit(22) formed at both sides thereof, and also includes a transfer conveyer(23) and a return conveyer(24) installed as two rows between the loading unit and the unloading unit, and allows the cassette to be automatically transferred. The primary cleaning unit(30) is installed at a front side of the loading unit and jets a cleaner introduced in a supply pipe through a nozzle to clean the glass transferred by the transfer conveyer. An etching unit(40) is installed at a rear side of the first cleaning unit and jets an etching solution introduced into a supply pipe through a nozzle to etch the glass transferred by the transfer conveyer. A secondary cleaning unit(50) is installed at a rear side of the etching unit and jets a cleaner introduced into a supply pipe through a nozzle to the etched glass to clean the glass transferred by the transfer conveyer. A drying unit(60) is installed at a rear side of the loading unit and dries the cleaned glass in CDA(Clean Dry Air). |
