发明名称 Method of fabricating magnetic sensors with pinned layers with zero net magnetic moment
摘要 A method for achieving a nearly zero net magnetic moment of pinned layers in GMR sensors, such as Co-Fe/Ru/Co-Fe, is described. The method determines a thickness of the first pinned layer which will yield the desired net magnetic moment for the pinned layers. A series of test structures are deposited on a substrate such as glass. The test structures include the seed layers, pinning layers and pinned layers and have varying thicknesses of the first pinned layer. The compositions of the materials and the thicknesses of all of the other films remain constant. The net areal magnetic moment of each test structure is measured and plotted versus the thickness of the first pinned layer. The thickness of the first pinned layer which corresponds most closely to zero net areal magnetic moment is chosen as the design point for the sensor.
申请公布号 US7367109(B2) 申请公布日期 2008.05.06
申请号 US20050048259 申请日期 2005.01.31
申请人 HITACHI GLOBAL STORAGE TECHNOLOGIES NETHERLANDS B.V. 发明人 LI JINSHAN;LIN TSANN
分类号 G11B5/127;H04R31/00 主分类号 G11B5/127
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