发明名称 Silicon-on-insulator chip with multiple crystal orientations
摘要 A silicon-on-insulator chip includes an insulator layer, typically formed over a substrate. A first silicon island with a surface of a first crystal orientation overlies the insulator layer and a second silicon island with a surface of a second crystal orientation also overlies the insulator layer. In one embodiment, the silicon-on-insulator chip also includes a first transistor of a first conduction type formed on the first silicon island, and a second transistor of a second conduction type formed on the second silicon island. For example, the first crystal orientation can be (110) while the first transistor is a p-channel transistor, and the second crystal orientation can be (100) while the second transistor is an n-channel transistor.
申请公布号 US7368334(B2) 申请公布日期 2008.05.06
申请号 US20050073911 申请日期 2005.03.07
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 YEO YEE-CHIA;YANG FU-LIANG
分类号 H01L21/00;H01L21/339;H01L21/84;H01L27/12 主分类号 H01L21/00
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