发明名称 |
Capacitor and its manufacturing method, ferroelectric memory device, actuator, and liquid jetting head |
摘要 |
A capacitor includes a lower electrode, a first dielectric film composed of lead zirconate titanate niobate formed above the lower electrode, a second dielectric film composed of lead zirconate titanate or lead zirconate titanate niobate with a Nb composition smaller than a Nb composition of the lead zirconate titanate niobate composing the first dielectric film, and an upper electrode formed above the second dielectric film.
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申请公布号 |
US7368774(B2) |
申请公布日期 |
2008.05.06 |
申请号 |
US20060531424 |
申请日期 |
2006.09.13 |
申请人 |
SEIKO EPSON CORPORATION |
发明人 |
HAMADA YASUAKI;KIJIMA TAKESHI |
分类号 |
H01L27/108;H01L21/8242;H01L29/76 |
主分类号 |
H01L27/108 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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