发明名称 |
Laser output light pulse stretcher |
摘要 |
Providing a high peak power short pulse duration gas discharge laser output pulse comprises a pulse stretcher a laser output pulse optical delay initiating optic diverting a portion of the output laser pulse into an optical delay having an optical delay path and comprising a plurality of confocal resonators in series aligned to deliver an output of the optical delay to the laser output pulse optical delay initiating optic. The plurality of confocal resonators comprises four confocal resonators comprising a twelve pass four mirror arrangement. An apparatus and method may comprise a plurality, e.g., two pulse stretchers in series and may include spatial coherency metrology.
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申请公布号 |
US7369597(B2) |
申请公布日期 |
2008.05.06 |
申请号 |
US20040847799 |
申请日期 |
2004.05.18 |
申请人 |
CYMER, INC. |
发明人 |
SMITH SCOT T.;ERSHOV ALEXANDER I.;LUKASHEV ALEXEI |
分类号 |
H01S3/083;H01S3/00;H01S3/036;H01S3/134;H01S3/225;H01S3/23 |
主分类号 |
H01S3/083 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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