发明名称 Potential fixing device and potential fixing method
摘要 An electric potential fixing apparatus of the present invention is an electric potential fixing apparatus that is connected to a connection line ( 17 ) between two capacitances, the first capacitance ( 14 ) and the second capacitance ( 15 ) that is directly connected to the first capacitance, includes the first high resistance ( 3 ), the second high resistance ( 4 ) that is connected directly to the first high resistance, a voltage dividing unit that outputs electric potential divided by the first high resistance and the second high resistance to the output terminal, the third capacitance ( 8 ) that is connected in parallel to at least either of the first high resistance and the second high resistance, and a voltage supply unit ( 1 ) operable to maintain constantly electric potential of the connection line between the two capacitances ( 14 ) and ( 15 ), holding combined total electric charge quantity of the first capacitance and the second capacitance, and the output terminal of the voltage supply unit is connected to a signal line between the two capacitances.
申请公布号 US7368920(B2) 申请公布日期 2008.05.06
申请号 US20040488597 申请日期 2004.10.04
申请人 TOKYO ELECTRON LIMITED 发明人 YAKABE MASAMI
分类号 G01R27/26;G01D5/24;G01N27/22;H04R3/06 主分类号 G01R27/26
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