发明名称 Polishing composition and polishing method
摘要 A polishing composition includes fumed alumina, alumina other than fumed alumina, colloidal silica, a first organic acid, a second organic acid, an oxidizing agent, and water. When the second organic acid is citric acid, the first organic acid is preferably malic acid, while when the second organic acid is malic acid, the first organic acid is preferably citric acid. When the second organic acid is succinic acid, iminodiacetic acid, itaconic acid, maleic acid, malonic acid, crotonic acid, gluconic acid, glycolic acid, lactic acid, or mandelic acid, the first organic acid is preferably either citric acid or malic acid. The polishing composition can be suitably used for polishing the surface of a substrate for a magnetic disk.
申请公布号 US7368387(B2) 申请公布日期 2008.05.06
申请号 US20040020545 申请日期 2004.12.22
申请人 FUJIMI INCORPORATED 发明人 UNO TAKANORI;SUGIYAMA HIROYASU;OWAKI TOSHIKI
分类号 B24B37/00;H01L21/311;B24B9/02;B44C1/22;C09G1/02;C09K3/14;C09K13/00;C09K13/06;G11B5/84 主分类号 B24B37/00
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