| 摘要 |
In measuring an optical path length difference, light from a light source is guided through a first and a second path. A three-way coupler combines light from the first and the second path in at least three combination, with at least three mutually different added relative phase displacements. A detector measures interference intensities of the at least three combinations. From the intensities, a calculation unit determines a phase difference between the light from the first and second path while eliminating an effect of a contrast between the light from the first and second path.
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