Optical measuring apparatus, illumination system, and light detecting system

摘要

An optical measuring apparatus includes: an illumination system having a toroidal mirror which is by circularly rotating a parabolic curve or its approximate curve around an axis with the focal point of the parabolic curve or the substantial light focusing point of the approximate curve forming a focal point arc; and a plurality of illuminators which are arranged in the vicinity of the focal point arc to reflect beams emanated from the illuminators by the toroidal mirror as parallel beams for projection onto the object surface in different directions on the measurement plane; a light detecting system which detects the reflection beams from the object surface in a specific direction; and a controller/calculator which successively turns on the illuminators, measures the reflection beams from the object surface in respective illuminating directions of the illuminators, and calculates reflection characteristics of the object surface in the respective illuminating directions.