| 摘要 |
A positioning apparatus, an exposure apparatus, and a method for manufacturing a device are provided to improve throughput by accelerating a stage in a short time through a repulsive power reinforcing unit. A positioning apparatus determines a position of a movable stage(4) in a first direction on a base guide(2). The positioning apparatus includes a driving unit, a repulsive power generator, and a repulsive power reinforcing unit(16). The mover reciprocally moves the stage in the first direction. The repulsive power generator includes a mover(5) installed on the stage and a stator installed on a base guide which are arranged to face a pair of magnets having same polarity. The repulsive power generator generates repulsive power with respect to impellent force of the stage. The repulsive power reinforcing unit applies impellent power greater than the repulsive power to the stage and expands a large area of the pair of magnets, thereby reinforcing the repulsive power.
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